Quantification of Additives in a Commercial CMP Sample Using HPLC With Photodiode Array and Mass Detection
Applications | 2022 | WatersInstrumentation
HPLC, LC/MS, LC/SQ
IndustriesEnergy & Chemicals
ManufacturerWaters
Key wordscmp, slurry, photodiode, additives, array, polishing, commercial, qda, ludox, mass, hplc, detection, quantification, supernatant, mix, acquity, mechanical, planarization, pda, slurries, using, sample, assay, confidence, detector, visibility, mixture, low, sitemap, centroid, waters, careers, privacy, formulated, cookie, xbridge, cookies, semiconductor, recovery, preferences, peg, conditions, chemical, scaled, adds, arc, diluent, compromising, noted, bed
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