QUANTIFICATION OF ADDITIVES IN A COMMERCIAL CMP SAMPLE USING HPLC WITH PHOTODIODE ARRAY AND MASS DETECTION
Posters | 2022 | Waters | HPLC SymposiumInstrumentation
HPLC, LC/MS, LC/SQ
IndustriesEnergy & Chemicals , Semiconductor Analysis
ManufacturerWaters
Key wordscmp, slurry, benzotriazole, peg, citric, additives, ludox, mix, phosphoric, acid, additive, pda, polishing, supernatant, photodiode, qda, serial, planarization, mass, slurries, array, peak, participant, mean, area, dilution, outlook, visibility, concentration, low, individual, award, expectations, work, xbridge, theory, semiconductor, quadrupole, analysis, hplc, helpful, adds, arc, diluent, single, calculating, standards, objective, fine, mechanical
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