How to Select the Proper Ion Pump

Significance of the Topic

Ion pumps are critical for achieving and maintaining ultrahigh vacuum (UHV) and extreme high vacuum (XHV) levels in research and industrial applications. Their clean, vibration-free operation, long service life and integrated pressure reading capabilities make them indispensable tools in fields ranging from surface science to semiconductor manufacturing.

Objectives and Study Overview

This technical overview aims to guide users in selecting the optimal ion pump configuration. It reviews the VacIon Plus series, compares different pumping elements, controllers and connectors, and discusses the role of auxiliary technologies such as titanium sublimation and nonevaporable getters to enhance overall vacuum performance.

Methodology and Instrumentation

The VacIon Plus family includes pumps with flange sizes from 3/8 inch tubes to DN250 CF, covering speeds from 2 to 1000 L/s. Three element types are available:

• Diode elements for maximal hydrogen and getterable gas pumping.
• StarCell elements for balanced performance with enhanced noble gas capture.
• Noble Diode elements optimized for noble gases at the expense of some hydrogen speed.

The overview also covers two controllers:

• IPCMini: single-channel, <1 nA resolution, suitable up to 500 L/s, optional Ethernet, Fischer or SHV connector.
• 4UHV: up to four pumps, higher power delivery, standard Fischer connector, optional Ethernet/Profibus.

Connector choices (Fischer vs. Kings/SHV) and voltage polarity requirements (positive for Diode/Noble Diode, negative for StarCell) are detailed. Auxiliary equipment includes:

• Titanium sublimation cartridges with cryopanels (LN2 or water cooled) or ambient shields for enhanced getterable gas pumping.
• Combined VacIon Plus CombiTSP pumps from 150 to 500 L/s.
• CombiNEG solutions pairing StarCell pumps with SAES NEG cartridges for sustained UHV performance.

Main Findings and Discussion

Element selection directly influences gas-specific performance: Diode excels in hydrogen removal but is less effective on noble gases; StarCell offers a robust compromise; Noble Diode improves noble gas pumping in constant UHV systems. Larger flange and pump sizes increase conductance-limited speed. Controller selection depends on power requirements and channel count, while connector compatibility ensures safe, reliable operation. TSP and NEG pairings significantly accelerate pumpdown and extend pump longevity under prolonged vacuum conditions.

Benefits and Practical Applications

• High vacuum levels without mechanical vibrations.
• Integrated pressure measurement down to UHV.
• Modularity of element, controller and auxiliary technologies to match diverse system requirements.
• Enhanced pumpdown times and gas-specific pumping via TSP and NEG options.

Future Trends and Applications

Advances are expected in integrated smart controllers with networked diagnostics, further miniaturization for compact UHV systems, and novel getter materials to broaden gas compatibility. Hybrid pumping modules combining ion, TSP and NEG technologies will continue evolving to offer turnkey solutions for next-generation research and high-throughput industrial processes.

Conclusion

Selecting the proper ion pump involves balancing flange size, element type, controller capability and auxiliary options to meet specific vacuum goals. The VacIon Plus series, together with TSP and NEG enhancements, provides a versatile platform capable of addressing the full spectrum of UHV and XHV applications.